Specification

• Load lock chamber mechanism
• Pump system
• Viewports
• Pressure measurement device

The upper cover of load lock chambers mechanism are sealed by viton gasket. Chambers are equipped with connecting flanges in UHV standard different sizes for connecting current and further equipment. Vacuum in load lock chambers should be from range between 1x10^-7 mbar and 1x10^-9 mbar.

The chambers can have options for LN2 cooling or heating samples up to 600°C. In this case they are equipped with cooling or heating mechanisms and electrical or fluid feedthroughs.

LOAD LOCK CHAMBER MECHANISMS

Application

Specification

The mechanisms are used in different applications, depending on place of connection to the UHV system like load lock chamber mechanism for: radial distribution chamber, linear transfer etc.

The load lock chambers mechanisms can have options for LN2 cooling or heating samples up to 600°C. In this case then equipped with cooling or heating mechanisms and electrical or fluid feedthroughs.

For the load lock chambers mechanisms there are some components like Stand for Load Lock Cover and Gripper designed for ease and convenience of changing sample holders.