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Microprocessor Controllers for complete UHV pumping system including pressure measurement.
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MG12 |
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Description
Multi Gauge controller MG12 has been designed to operate two analog gauges at once. Controller can display both of channels on a large display which has been implemented into the 1HE standart unit only, also as 1 channel with bar graph presentation.
Measurement channels 1 has been designed to operate on: TTR 90, TTR 90S,TTR 91, TTR 91S, PTR 237 and channel 2 is extended to additionally operate ioni gauge type ITR 100 and ITR 90. One of the big advantage of this instrument is it possibility of using four interlocks. Each of them can separately be programmed for each channel, with own programmable hysteretic also as "below" or "above" options.
The measurement channel are active immediately after applying the power. When an IR 90 is connected, the emmision control facility is not active. All operating modes of triggers and the transmitters are displayed and their status is indicated via the outputs.
Application
- Any high and ultra high vacuum systems
- Measurement of ultimate pressure (from atmosphere to UVH range)
- Bakeable and non bakeable systems
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MG13 |
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Description
The Multi Gauge MG13 controller is a control unit which is able to supports the operation of 2 vacuum gauges Bayard-Alpert Gauge and any others existing gauges on the market based on 0÷10V output standard. As a standard all of rlikon-Leybold gauges are implemented: ITR 100, ITR 90, DI 200, DI 2000, TTR 211 S, TTR 91, PTR 225. Any others can be implemented as an option. Inspite of 1HU unit only, controller is able to display both of channels at once on the big alphanumeric LCD display. Nice blue alphanumeric display allows to clearly readouts.
As a big advantage of this instrument it can be possibleities to use up to four triggers, which can programmable for each channel separately, with own programmable hysteretic also as 'below' or 'above' options. The measurement channels are active immediately after applying the power, and ready to emision. Channel one is dedicated to control B-Agauge only. Really flexible settings of B-Agauge parameters allows to connect almost all of B-A gauges available on the market. Such a 2 channel controller combination is perfectly suitable in 2 stages pumps group units, where two ranges (low and high vacuum) has to be controlled. More over the automatic emission control facility can be used to automatic EMISSION of B-A gauge control related to the low vacuum measurement. All operating modes of the triggers and the transmitters are displayed and their status is indicated via the outputs.
Adventages
- 1 HU/42HP unit only in 19” Standard
- Measurement range from atmosphere to 10-12 mbar
- Almost all of Bayard-Alpert gauges are suitable
- Degassing of Bayard-Alpert with power and time limit filaments supports Ir/W/Thoria
- RS 232 or RS 485 interface in standard
- Bayard-Alpert overpressure protection
- Selectable measurement units: mbar, Torr, Pascal
- Gas correction of ionization gauges possibilities, with one customized setting
- Universal power supply: 90÷240VAC, 50÷60Hz
- Unit overtemperature protection
- Sound alarm
- Four setpoints adjustable, with hysterisis with 'above' and 'below' option (individual programmed)
- User-definied channel naming
Applications
- Any high and ultra high vacuum systems
- Measurement of ultimate pressure (from atmosphere to UHV range)
- Bakeable and non bakeable systems
| Specification |
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| Measurement chanels |
2 |
Mesurement range:
Chanel 1: B-A gauge
Chanel 2: 0 ÷ 10V DC input | 1x10-11 mbar
5x10-10 mbar* |
| Display |
LCD 2x20 characters
9.96 mm high each line |
Setpoints ( individual programming
for each channel possible ) | 2 (4 options) |
| Suitable Gauges in standard** |
DI 200, DI 2000,TTR 211 S,
TTR91, PTR 225,
ITR 90, ITR 100 |
| Hysteresis | adjustable |
| Dimentions [mm]: (˝ of 1HE) |
240x260x44 |
| Weight | 1 kg |
| Supply |
90÷240 VAC |
| Operating temperature | 5÷50 C |
| Interface |
RS 232 or 485 Profibus on
request
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* related to the connected gauge
** any other can be implemented on request
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MG12-8 CH |
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Description
Vacuum Gauge MG12-8CH is a versatile, microprocessor controlled device, that is able to support the operation of 8 vacuum gauges simultaneously.Device handles almost every gauge type on market, that are based on 0-10V or 4-20mA DC standard. As a standard,all following Oerlikon-Leybold and MKS instruments gauges are implemented : TTR90,TTR100,TTR211, CTR90 , ITR90, ITR100, DI200, DI 2000, PTR 225, MKS870. Any others can be implemented optionally, with the exception of extractor gauge. Controller can display simultaneously every combination between 1 and 8 channels, font size adapt itself according to number of displayed channels.As a big advantage of this instrument it is possible to set up to 16 setpoints, that can trigger up to 16 relays.Every one could be programmed independently of each other, for any measurement channel , using hysteresis and switch logic „above” and „below” setpoint. Any of those setpoints can control any of given relays, there are 16 relays :
• 8 ( 2-contact) items NO („normally opened”), and
• 8 ( 3-contact) items NO/NC („normally opened” or „normally closed”).
Measurement channels are active instantly after power up. Device has also feature of automatic gauge type recognition.User can either scan for a implemented gauge type or choose type manually. There is also possibility to choose one of 7 predefined gases, or user defined one, for every channel separately. Gas type has considerable influence on readings, case MG12-8CH operates with for example, ionisation gauge. User can control emission (unlimited time), and degas (limited time) on particular channel. Controller has also feature of automatic broken cable or damaged gauge head recognition, in that case , warns user about failure.
All active parameters are displayed on the screen, device status is additionally indicated through LED diodes.
User can also put 4 analog input channels on output (signal mirroring), and use them for any other purpose.
Advantages
• Small enclosure dimensions – only 3U and 42 HP (19’’ rack standard)
• Pressure measurement range from 1x10-10 mbar - 2x105 mbar
• Self adapting font size (according to adjustable number of displayed channels) allows reading particular channels on distance
• Device can handle almost every gauge head present on market* (*that give output signal within range 0-10V or 4-20mA DC)
• Degas function with adjustable timer (0:00 – 15:00 min/sec)
• Possibility of set up 16 setpoints, therefore 16 triggers with hysteresis, also adjustable logic „above” and „below”. Each of them may control any of present 16 relays.Every channel may control any trigger.
• Communication interfaces RS232/485/422, USB, Profibus DPV1,Modbus, EtherNet/IP, Bluetooth (other standard on demand)
• Overpressure protection – automatic switch off (Degas and Emission- B-A gauges)
• Selectable pressure units: mbar, Torr or Pascal
• Gas type correction factors for ionisation gauges , for majority of popular gases , additionally user defined factor
• Channel name defined by user (for easy orientation)
• Save and restore all settings feature
• Versatile Power Supply: 90÷240 VAC, 50÷60 Hz
Applications
• Every low, high and ultra high vacuum systems –
vacuum measurement
• Every high pressure system – pressure measurement
• Measurement both bakeable and non-bakeable
systems
• Pressure measurement within range of Ultra High
Vacuum till high pressures (3000 psi)
• Vacuum Pump (Forevacuum and Turbo) steering - controlled by any channel and setpoint
• ON/OFF (relay based) steering for any other device - controlled by any channel and setpoint
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TMC-13 |
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Description
TMC13 is the newest technology electronics designed for monitoring and controlling any coating and deposition processes. Up to six channel inputs and two additional vacuum gauge channels together with 6,5 " TFT display makes this unit really unique and universal. Sensor inputs can be assigned to different materials with individual parameters as well. High speed and high accuracy measuring process controlled by DSP processor improves the film quality and repeatability. It brings also the features of accuracy, stability and instrument configuration.
Features
- Six channels inputs in standard - average value possible
- 6,5 " TFT touch panel display with active touch interface
- Compact design
- Two inputs for any active vacuum gauges, analogue configuration possible as well
- Wide range of interface on demand (USB,RS232/485, Ethernet, Bluetooth) can be added anytime
- Shutter and I/O Relay Outputs - independent to channel programmable
- Two analog outputs for rate and thickness monitoring with 16 bits resolution
- Unit WEB enabled
- Industry Standard 6 MHz Sensing Crystal
- Frequency resolution 0,1 Hz
| Specification |
| Supply voltage | 100 - 240VAC 50/60HZ 2.2A |
| User interface |
TFT LCD 6.5", 400x240px with integrated touch panel |
Communication Interface
| RS232/485/422, USB, EtherNet/IP, Bluetooth |
| Dimensions [mm] |
W: 212.6 mm (42HP), H: 128.4 mm (3HU), D: 260.9 mm |
TM13 sensor inputs
| 6 |
| Thickness |
0 - 9999000 Å |
| Rate | 0 - 9999 Å/s |
| Frequency resolution |
0.1Hz |
| Frequency Range | 2-6 MHz |
| Thickness Resolution |
0.1 Å |
| Rate Resolution | 0.1 Å/s |
| Tooling Factor |
1 - 400% |
| Measurement units | Å, kÅ, nm |
| Measurement period |
0.25 s |
| Shutter control | manual, time, thickness |
| Shutter Time |
1 - 1000000 s |
| Shutter Thickness | 0 - 9999000 Å |
| Pressure channels inputs |
2 |
| Compatible sensors | ITR90, ITR100, PTR90/225/237, CTR90/91, TTR90, TTR211/216, MKS 870B Baratron and PG105 |
| Measurement units |
mbar, Pa, Torr, Psia |
| Degas Time | 1 - 3 min |
| Output |
• 8 relay outputs (2 outputs with COM NC and NO contacts,
6 outputs with COM and NO contacts)
• 2 analog outputs: 0-10V (thickness, rate, pressure)
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| Inputs | 4 digital inputs (in 5V logic) |
| Operating temperature |
15 - 40°C |
| Weight, approx | 3 kg |
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Elektronika 
